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The 1250 sq.ft.
NETS Laboratory
houses two state of the
art Transient/Stationary Thermoreflectance systems ($880K) that are
used for
accurate measurements of thermal properties and temperature of active
microelectronic devices. The lab also houses a Stokes ellipsometer and
a modern profiler and other opto-electronic
equipment for activating and measuring electronic devices ($300K); and
computing and data acquisition systems.
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TTR
System
- Thermal property measurements, both
in-plane and through-plane
- 7 ns pulse width of the heating laser
- Probing spot diameter smaller than 0.7
microns
- Computer controlled probing for up to
8-inch samples
- Sample base
maintained at fixed temperature (0°-200°C)
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STR
System
- Probing
spot diameter smaller than 0.8 mm
- Less than
± 2°C uncertainty over a 200°C temperature range
- Automated
probing of a sample’s surface along a prescribed trajectory
- Five (5)
MHz tracking capability of temperature variations
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New,
Compact
TTR System
- new and improved compact design for
increase speed and accuracy of the measurements
- 6 ns pulse width of the heating laser
- 30 Hz probing rate
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Sample
Preparation &
Testing
- Veeco
Dektak3ST profiler: 1 Angstrom vertical resolution, 50 mm max.
scan length.
- Gaertner
Stokes Ellipsometer: ±3 Angstroms accuracy, ±1 Angstrom repeatabillity, ± 0.005
refrective index.
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Electronic
Devices/ Activation
- TWT amplifier
- HP 54522C Oscilloscope
- HP85120A Drain Pulser
- HP8110A Pulse Generator
- HP4142B Power supply, etc.
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General NETSL Pictures
- 1250 sq.ft. of space
- 6 PCs, 1 UNIX terminal
- Six cubicles
- Air Table
- Optical Table
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