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Measurement of the Thermal Conductivity of
Thin-Films
- Measure the transient surface reflectance and
calculate the thermal
properties of a wide array of submicron thin-film materials used in
high performance ICs, IR detectors, and TECs.
- The TTR
laser-based technique was extended to the
measurement of the thermal properties of optically transparent
dielectric materials by using an approach that involves:
- covering the dielectric material with a
thin-film metallic surface,
- measuring the optical reflectance of the top
metallization layer, and
- solving an inverse heat transfer problem.
Consequently, the thermal properties of the embedded dielectric
material will be inferred.
- Thermal
property measurements, both in-plane and through-plane
- 7
ns pulse width of the heating laser
- Probing
spot diameter smaller than 0.7 microns
- Computer
controlled probing for up to 8-inch samples
- Sample base
maintained at fixed temperature (0°-200°C)
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