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The SMU Clean Room The SMU Clean Room has a class 10 photolithography area and a class 1000 main area. A partial list of equipment in the clean room includes: hoods, photoresist spinners, contact mask aligners, thermal evaporator, plasma asher, plasma etcher, turbo-pumped reactive ion etcher, ion beam etch system, microprobe stations, ultrasonic cleaners, sputtering system, plasma-enhanced chemical vapor deposition (PECVD) system, e-beam evaporator, photoluminescence system, ellipsometers and profilometers. Support outside the clean room includes a scanning electron microscope, atomic force microscope, wafer lapper, wafer saw, and cleave and scribe tools. The pictures of the SMU Clean room equipment are shown below:
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Please send any questions or comments about this website to Jingjie Zhao (Carolyn) at CarolynZhao@gmail.com. |
Number of Visitors since July 2004: |
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